variable-shaped electron-beam exposure system

variable-shaped electron-beam exposure system
устаткування електронно-променевої літографії із змінним перерізом електронного променя

English-Ukrainian dictionary of microelectronics. 2013.

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  • Lithographie a faisceau d'electrons — Lithographie à faisceau d électrons L utilisation d un faisceau d électrons pour tracer des motifs sur une surface est connue sous le nom de lithographie par faisceau d électrons. On parle également de lithographie électronique. Par rapport à la… …   Wikipédia en Français

  • Lithographie À Faisceau D'électrons — L utilisation d un faisceau d électrons pour tracer des motifs sur une surface est connue sous le nom de lithographie par faisceau d électrons. On parle également de lithographie électronique. Par rapport à la photolithographie, l avantage de… …   Wikipédia en Français

  • Lithographie à faisceau d'électrons — L utilisation d un faisceau d électrons pour tracer des motifs sur une surface est connue sous le nom de lithographie par faisceau d électrons. On parle également de lithographie électronique. Par rapport à la photolithographie, l avantage de… …   Wikipédia en Français


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